optical lithography
1.0 Introduction (200-250)
– what is optical lithography
– steps include spin coating of photoresists, soft bake, mask alignment, UV exposure, and development
– the relationship between feature resolution and wavelength of light
-do not include history
1.1 Technique of optical lithography (include one figure)
1.1.1 Contact lithography (150)
– what is contact lithography and the principles
1.1.2 Proximity lithography (150)
– what is proximity lithography and the principles
1.1.3 Projection lithography (150)
– what is projection lithography and the principles
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Order Paper Now1.2 Applications (150-200)
– general application
– what drives miniaturizationin chip fabrication.
